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Gerät zum Messen der Oberflächenrauheit

Surface Roughness Measuring Instruments

Various measurement tools are available in the market for analyzing and evaluating surface roughness and shape.
This section introduces the principles and characteristics of typical contact-type measuring instruments (surface roughness tester and atomic force microscope) and non-contact type measuring instruments (white light interferometer and laser scanning microscope).

Method Contact type Non-contact type
Measuring instrument Contact-type
roughness tester
Atomic force microscope
(AFM)
White light
interferometer
Laser
microscope
Measurement resolution 1nm < 0.01 nm < 0.1 nm 0.1nm
Height measurement range up to 1 mm
up to 0.04"
< 10 μm
< 0.39 Mil
< a few mm
< a few fractions of an inch
< 7 mm
< 0.28"
Measurable range a few mm
a few fractions of an inch
1 to 200 μm
0.04 to 7.87 Mil
40 μm to 15 mm
1.57 Mil to 0.59"
15 μm to 2.7 mm
0.59 Mil to 0.11"
Angular characteristic Poor Fair Good
Data resolution VGA VGA SXGA
Measurement site positioning Optional Built-in optical camera Built-in optical camera
Damage to samples Contact Contact Non-contact Non-contact



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